Fabrication of SU-8-Based High-Aspect-Ratio Optrode Array Integrated with Reflowed Glass Lenses Using an Out-of-Plane Configuration

Author

Kyeong-Taek Nam*, Chaesung Kim*, Yong-Kweon Kim, Seung-Ki Lee, Maesoon Im†, Jae-Hyoung Park†

Conference name

The 39th Annual Conference of the IEEE Micro Electro Mechanical Systems (IEEE MEMS’26)

Location

Salzburg, Austria

Conference date

Jan. 25-29, 2026

etc.

(*These authors contributed equally.)

Link

https://doi.org/10.1109/MEMS64181.2026.11419530 393회 연결