Fabrication of high-density 3D silicon microelectrode array using isotropic DRIE

Author

Young Jun Yoon, Jin Soo Park, Dong-Hyun Kang, Seung Min Kwak, Byung Chul Lee, and Maesoon Im

Conference name

The 22nd Korean Micro Electro Mechanical Systems Conference (KMEMS’20), TP-1-03

Location

PyeongChang, South Korea

Conference date

Aug. 19-21, 2020