A new patterning technique on UV sensitive transparent film with chip embedded photomask

Author

Oktay Yarimaga, Tae Won Kim, Yun Kyung Jung, Maesoon Im, Bonsang Gu, Hyun Gyu Park, and Yang-Kyu Choi

Conference name

The 15th Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices (AWAD), pp. 320-323

Location

Gyeongju, South Korea

Conference date

Jun. 25-27, 2007